5kW/8kW Power Supply for Super High Voltage Mercury Lamps for Steppers

We have adopted the latest manufacturing technology to develop a dual 5kW/8kW power supply unit for next generation steppers (exposure devices).

The global demand for a general-purpose 5 to 8kW power supply has increased dramatically!

With increasing component density, the need for high etching accuracy of circuit boards continues to grow. In fact, it has now become a major showcase of a manufacturer's technical ability and aptitude for production of value added goods. Etching processes use a photographic step that requires a higly stable and intense light source, and this has increased demand for powerful light sources. While stepper machines have increased their lamp outputs to 10-35kW in order to increase accuracy and production, 5-8kW machines still have an important presence in the overseas market.

Usage Example

[Features]

1. Improved controllability as an integrated component.

In consideration of the FA trend in latest production sites, we have included an interface that allows output adjustments externally. This allows the user substantial external terminal control. The design also incorporates many other user-friendly features that only a company with a deep knowledge of its customers would incorporate.

2. International input (200/400V) compatibility.

As this unit was designed for domestic and overseas production facilities, we have made sure that worldwide input specifications have been adhered to.

3. Compact design.

By increasing the operating frequency around 35% compared to conventional units, the coil (like reactor parts) have been made smaller and less expensive. Also, ripple currents in the lamp have been suppressed, increasing the performance.